Single-crystal atomic layer deposited Y<inf>2</inf>O<inf>3</inf> on GaAs(0 0 1) - Growth, structural, and electrical characterization

Journal

Microelectronic Engineering

Journal Volume

147

Pages

310-313

Date Issued

2015

Author(s)

Wu, S.Y.

Chen, K.H.

Lin, Y.H.

Cheng, C.K.

Hsu, C.H.

Kwo, J.

DOI

10.1016/j.mee.2015.04.061

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443320

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84929167786&doi=10.1016%2fj.mee.2015.04.061&partnerID=40&md5=1e23a693bb1f68959599170061103088

SDGs

[SDGs]SDG7

Type

journal article