Electron-beam lithography assisted patterning of surfactant-templated mesoporous thin films

Journal

Nanotechnology

Journal Volume

15

Journal Issue

12

Pages

1886-1889

Date Issued

2004

Author(s)

Wu, C.-W.

Aoki, T.

Kuwabara, M.

KEVIN CHIA-WEN WU

DOI

10.1088/0957-4484/15/12/035

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-11144292053&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/307677

Type

journal article