A Novel Six-DOF Precision Positioner Utilizing Hybrid Mechanism with Magnetism and Fluid
Date Issued
2007
Date
2007
Author(s)
Huang, Sheng-Chih
DOI
en-US
Abstract
This thesis proposes a novel six-degree-of-freedom (DOF) electromagnetic precision positioner made of a hybrid mechanism utilizing both magnetic driving force and fluid upper lifting power, in which the new structure, the electromagnetic actuator, and the effective controller are developed. The concept of the mechanism design not only involves the magnetic driving mechanism but also the fluid buoyancy and damping properties, of which the latter help counter-balance weight of the platen so as to achieve very low steady-state power consumption. The four goals of novel system design include: (1) to have large moving range (in mm level), (2) to achieve precision positioning, (3) to design compact but low-cost mechanism, and (4) to achieve low power consumption.
In this system, totally there are eight permanent magnets (PMs) attached to the movable carrier, and eight electromagnetic coils appropriately mounted on a fixed based. After exploring the characteristics of the magnetic forces between PMs and electromagnetic coils, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior and uncertainties of the underlying system, a robust adaptive sliding-mode controller is proposed to guarantee the system stability for both regulation and tracking tasks. Meanwhile, a traditional PID controller is presented for comparison with the hereby developed robust adaptive sliding-mode controller. Finally, we have conducted extensive experiments to demonstrate the performance of the proposed system. The experimental results show that traveling range is 3mm×3mm×4mm, and the tracking error in each axis is kept within 10um, which is up to the limit of our optical sensors.
Subjects
混合式機構
電磁致動器
強健可適應性滑動模式控制器
PID控制器
Hybrid magnetic and fluid mechanism
Electromagnetic actuator
Robust Adaptive sliding-mode controller
PID controller
Type
thesis
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