E-beam photoresist and carbon nanotubes as biomimetic dry adhesives

Resource

MEMS 2006 Istanbul. 19th IEEE International Conference on Micro Electro Mechanical Systems, 926-929

Journal

MEMS 2006 Istanbul. 19th IEEE International Conference on Micro Electro Mechanical Systems

Pages

926-929

Date Issued

2006

Date

2006

Author(s)

Tsai, Yao-Chuan

Shih, W.-P

Wang, Yu-Ming

Huang, L.-S

Shih, P.-J

DOI

URI

Type

conference paper

File(s)

Name

78.pdf

Size

23.42 KB

Format

Adobe PDF

Checksum

(MD5):0c3b1fa7200f105aa7562e177634c683