The relaxation of stress and reduction of KOZ by the special designed trench structure near the TSV for the application of 3-DICs

Journal

Asia-Pacific Radio Science Conference

Pages

4834-4838

Date Issued

2013

Author(s)

M.-Y. Yu

G.-H. Liu

C.-H. Chen

C.-X. Hong

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/404570

Type

conference proceedings