Mechanical Properties of Amorphous Boron Carbon Nitride Films Produced by Dual Gun Sputtering

Journal

Diamond and Related Materials

Journal Volume

12

Journal Issue

9

Pages

1463-1471

Date Issued

2003

Author(s)

S. C. Chien

S. Chattopadhyay

S. T. Lin

K. H. Chen

DOI

https://doi.org/10.1016/S0925-9635(03)00175-4

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503941

Publisher

Elsevier B.V.

Type

journal article