Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication

Journal

IEEE Transactions on Robotics and Automation

Journal Volume

17

Journal Issue

5

Pages

619-636

Date Issued

2001

Author(s)

Lin, M.-H.

Huang, A.-C.

DOI

10.1109/70.964663

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/501177

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0035485508&doi=10.1109%2f70.964663&partnerID=40&md5=72bb0abbd56221a3009ca70e144a2989

Type

journal article

File(s)

Name

18.pdf

Size

770.04 KB

Format

Adobe PDF

Checksum

(MD5):93561e0c858e6a151832619b94c1f491