Dual-Stage Piezoelectric Nano-Positioner Utilizing a Range-Extended Optical Fiber Fabry-Perot Interferometer
Resource
IEEE/ASME Transactions on Mechatronics 12 (3): 291-298
Journal
IEEE/ASME Transactions on Mechatronics
Journal Volume
12
Journal Issue
3
Pages
291-298
Date Issued
2007
Date
2007
Author(s)
Abstract
This paper proposes a new modulation scheme using high-order harmonic information to solve the so-called ambiguity problem of interferometry. To start with, we build a fiber Fabry-Perot interferometer to serve as a displacement sensor, which has two operation modes - coarse and fine modes. Integrating the afore-developed sensor, a piezoelectric actuator, and a scheduled proportional-integral/adaptive-sliding controller, we construct a dual-stage nanopositioning system. The experimental results show that the proposed system has the capability to extend the positioning range beyond the limit of the wavelength while keeping the naturally high resolution, ±5 nm, of interferometry. © 2007 IEEE.
Subjects
Adaptive control; Interferometry; Modulation; Nanopositioning; Optical fiber
SDGs
Other Subjects
Adaptive control systems; Modulation; Optical fibers; Piezoelectric actuators; Proportional control systems; Dual-stage piezoelectric nano-positioner; High-order harmonic information; Fabry-Perot interferometers
Type
journal article
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