Sidewall smoothing of Si/SiO2 waveguide by excimer laser reformation

Journal

2007 International Nano-Optelectronics Workshop, iNOW

Pages

214-215

Date Issued

2007

Author(s)

Hung, S.-C.

Liang, E.-Z.

DOI

10.1109/INOW.2007.4302958

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-47849105699&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/332073

Type

conference paper