Design, Fabrication and Evaluation of 2D Structure Piezoelectric MEMS Generator
Date Issued
2009
Date
2009
Author(s)
Lin, Shun-Chi
Abstract
This dissertation presents the development of a piezoelectric MEMS generator that has the ability to scavenge mechanical energy of ambient vibrations and transform it into useful electrical power. The piezoelectric MEMS generator is a 2D structure type transducer made with silicon process and can transform mechanical energy into electrical energy with piezoelectric PZT layers. The d31 mode device is the PZT layer sandwiched in between laminated electrodes. A home-made PZT deposition machine using aerosol deposition method was used to fabricate the high-quality PZT thin film efficiently. The experimental results show that single branch of the device has maximum output power of 12.44 nW with 82.27 mVP-P output voltage excited at its resonant frequency, 110.2 Hz under 1.6 g acceleration level. The device has maximum output power of 13.09 nW with 73.09 mVP-P output voltage measured at its resonant frequency 110.5 Hz under 1.6 g acceleration.
Subjects
MEMS
piezoelectric material
aerosol deposition
cantilever beam
power harvesting
Type
thesis
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