Fast Multiple Dielectric Capacitance Extraction with Image Method
Date Issued
2006
Date
2006
Author(s)
Wang, Chih-Yu
DOI
en-US
Abstract
The ever-increasing complexity of nano-scale ULSI design has made
parasitic capacitance extraction more and more challenging.
Efficient and accurate capacitance calculation is needed urgently
for delay evaluation especially for deep sub-micron designs. With
the wide-spread application of multiple-layer interconnect
structure, the BEM based discretization of dielectric-dielectric
interfaces not only significantly increases the execution time and
memory consumption, but also gives rise to instability and
inaccuracy during the surface charge density calculation.
In this thesis, we propose a fast multiple-dielectric capacitance
extraction algorithm, MimCap, by integrating the truncated image
method (TIM) into a hierarchical sparse capacitance extraction
approach. The truncated image method approximates the
dielectric-dielectric interface by a finite series of image charges
and hence avoids the undesirable dielectric-dielectric interface
process. Extensive experimental results demonstrate that MimCap is
not only fast but also accurate. By preserving only the first 1~3 orders of image charges, MimCap exhibits over 100X
speedup compared with FastCap while maintaining percentage error
around 2%.
Subjects
電容萃取
多層介質
capacitance extraction
multiple dielectrics
image method
Type
thesis
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