Activation energy of water vapor and oxygen transmission through TiNxOy/PET gas barrier films
Resource
Applied Surface Science, 256(23), 7242-7245
Journal
Applied Surface Science
Pages
7242-7245
Date Issued
2010
Date
2010
Author(s)
Abstract
Titanium oxynitride (TiN x O y ) films were deposited on polyethylene terephthalate (PET) substrates by means of a reactive radio frequency (RF) magnetron sputtering system in which the power density was the varied parameter. Experimental results show that the deposited TiN x O y films with a thickness of about 55 nm have similar contents of TiN, TiN x O y and TiO 2 bonds, although they are deposited at different power densities. The TiN x O y films deposited at a lower power density have fewer internal defects and grain boundaries and possess higher activation energy and a lower rate of water vapor and oxygen transmission through TiN x O y /PET films. © 2010 Elsevier B.V.
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Type
journal article
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