The development of a long-stroke precision positioning stage for micro fabrication by two-photon polymerization
Journal
Journal of Laser Micro Nanoengineering
Journal Volume
11
Journal Issue
1
Pages
1-12
Date Issued
2016
Author(s)
Abstract
This paper applies a combined precision stage to fabricate micro-structures by two-photon polymerization (TPP). The combined stage consists of PZT and stepper-motor stages to achieve precision positioning in long displacements. First, we derive the models of the stages by identification experiments. Second, we apply robust loop-shaping techniques to improve the positioning performance of the stages. Third, we integrate the stages and develop a multi-loop control structure to provide long-stroke and high precision. In addition, we propose coordinate transformation and anti-locking functions for further improvement of the system performance. Last, we apply the combined stage to a TPP system for fabricating micro-structures, and define performance indexes based on image processing and optical qualities. The obtained performance criteria can be used to adjust controller design to improve precision manufacturing.
Publisher
Japan Laser Processing Society
Type
journal article