形狀記憶微泵的模型、特性與製程之開發研究(3/3)
Date Issued
2005-07-31
Date
2005-07-31
Author(s)
DOI
932212E002004
Abstract
This 3-year project focuses on the measurement of key properties of Ti-Ni thin
film and on the design of non-valve shape memory micropump. We have used Ti-Ni
thin film as the actuating source and developed a diffuser as the main part of
micropump’s flow channels.
On the point of view of measurement of properties of Ti-Ni film, we have
adopted the Scanning Electron Microscope (SEM) to observe the cross section of
Ti-Ni thin film, the Differential Scanning Calorimeter (DSC) to measure the
transformation temperature of Ti-Ni thin film, the EDS to qualatively measure the
composition analysis of Ti-Ni thin film, Electron Probe X-ray Microanalysis (EPMA)
to measure precisely the composition of Ti-Ni thin film. In addition, on the point of
view of mechanical testings, we have designed the clamp apparatus for Ti-Ni thin film
to qualitatively measure the sahpe-memory effect of Ti-Ni films and foils under
pressure.
Regards to the MEMS process of micropump, we have designed different
components of diffusers for the flow channels. In addition, we have used the
conventional FEM solver to analyze the internal stress of the thin film under different
pressure. The design criterion has been brought up for the development of the
non-valve micropump in detail. Finally, we have used the technique of anodic
bonding to assemble the flow channels and the actuation chamber together.
Subjects
Shape Memory Alloy
Shape Memory Effect
Diffuser
Anodic Bonding
Publisher
臺北市：國立臺灣大學應用力學研究所
Type
report
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