Two-axis MEMS scanners with radial vertical combdrive actuators - Design, theoretical analysis, and fabrication
Resource
Journal of Optics A: Pure and Applied Optics 10 (4): 044006
Journal
Journal of Optics A: Pure and Applied Optics
Journal Volume
10
Journal Issue
4
Date Issued
2008
Date
2008
Author(s)
Abstract
We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained. © IOP Publishing Ltd.
Subjects
Radial combdrive actuators; Small form factor; Surface micromachining; Two-axis scanner
Type
journal article
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