Design and Development of Plasmonic Nano-Lithography Platform
Date Issued
2007
Date
2007
Author(s)
Hsu, June-Fan
DOI
en-US
Abstract
This thesis took the plasmoic lithography first proposed by Xiangang Luo and Teruya Ishihara et al as the starting point to study the coupled-surface plasmon (SPP) resonance modes. It is anticipated to utilize the learning from the course of this research to develop a nanolithography platform for prototype development.
In the theoretical part, I have derived the physical model and solved the governing equations by using numerical method Nelder-Mead Simplex algorithm. It enables us to find out how to excite the coupled mode by selecting a correct period of the metal grating. The dispersion curves for coupled modes were successfully solved and plot by home-made MATLAB programs. In simulations, we use finite difference time domain (FDTD) to calculate the electromagnetic fields and data analysis by the using MATLAB. We designed three kinds of mask for plasmonic lithography and checked their practicality. Simulation results were verified by using the theoretical prediction.
In experiments, we produced the masks by focused ion beam (FIB) and electron beam lithography (EBL). By integrating metal lift-off process and our newly tried negative resist, EBL were identified to be a powerful tool to produce near-field metal masks including for plasmonic lithography. Its efficiency was found to be even higher than that of FIB. Features of 150 nm in size have been made successfully. The sinusoidal metal grating was also fabricated through the gradient exposure by EBL. For the platform, we retrofit the inverted microscope into a nanolithography platform. It can be controlled automatically by using a friendly interface developed by LabVIEW. This mini exposure system was identified to be suitable for integrating with the nanowriter developed by our Nano-BioMEMS Group since 2003.
Subjects
表面電漿振子
電漿子微影術
耦合型表面電漿模態
電子束微影術
金屬剝離製程
微小化光機
Surface-Plasmon Polariton
Plasmonic Lithography
Coupled Surface-Plasmon Polariton modes
Electron Beam Lithography
Metal lift-off process
Minituralized Plasmonic Nanolithography Platform
Type
thesis
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