Design and Development of a 3-axes Close-looped Nano-scale Positioning System
Date Issued
2008
Date
2008
Author(s)
Hsin-Ting, Liu
Abstract
High-resolution position stage is the footstone of the precision technology. A nano-level resolution positioning stage plays a important role in the development of nanotechnology. This paper proposes a 3-axis positioning stage built up by piezoelectric actuators as the actuating system and HOE-DVD pickup head as the displacement measurement system. Piezoelectric units are often used in micro-level actuator; by using the precise voltage control piezoelectric units can also fulfill a nano-level actuation. In order to increase the stroke of piezoelectric actuator, a flexible structure without backlash and friction is utilized. Its relationship between the displacement amplifying effect and the geometric parameters of flexible structure is studied by the theoretical analysis and the finite element analysis. For matching the actuation stroke, the optical displacement measurement system is modified by varying focal length of the lens. Besides, the elaborate application of the miniature HOE pickup head makes the whole system more compact to promote the widespreading application of the nano-level positioning systems. Furthermore, diverse properties of the positioning stage including stroke, linearity, repeatability and resolution are verified by experimental testings.
Subjects
HOE-DVD pickup head
piezoelectric actuators
displacement measurement
focus error signal
linear range
flexible structure
Type
thesis
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ntu-97-R95522617-1.pdf
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