Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering

Journal

Diamond and Related Materials

Journal Volume

12

Journal Issue

9

Pages

1463-1471

Date Issued

2003

Author(s)

Chien, S. C.

Chattopadhyay, S.

Chen, L. C.

Lin, S. T.

Chen, K. H.

DOI

10.1016/S0925-9635(03)00175-4

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/445760

Type

journal article