CMOS微型靜電馬達的機構與電路設計
Mechanism and Circuit Design of CMOS Electrostatic Micromotors
Date Issued
2004
Date
2004
Author(s)
Chang, Ming-Hui
DOI
en-US
Abstract
本研究主要是利用標準CMOS製程來設計靜電式微馬達的機械結構與驅動電路。前製程採用TSMC (Taiwan Semiconductor Manufacturing Company) 所提供的0.35um DPQM (Double Polysilicon Quadric Metal) CMOS製程，並利用兩種後製程將所選擇的犧牲層蝕刻，使懸浮的轉子釋放。一種先以金屬為犧牲層，再以二氧化矽為犧牲層，並可用磷酸做為蝕刻液；另一種以二氧化矽作為犧牲層，並可用氫氟酸做為蝕刻液。
驅動電路採用兩種方式，首先，利用Master-Slave Register 產生三相訊號(Q1、Q2、Q3)，再利用4階Heap Pump Circuit將其電壓提升到25V。另一種利用J-K正反器及4階Heap Pump Circuit驅動。
微馬達有50um與100um兩種不同直徑的尺寸，靜子與轉子間的間隙有1um及2um。在此我們結合了CMOS及MEMS技術來製作微型靜電馬達，以達成電路與機構嵌入在一個晶片中，藉此提升微馬達的效能及減少其尺寸(1.732mm *1.732mm )。
This thesis focuses on designing the mechanical structure and driven circuitry of electrostatic micromotors by utilizing the standard complementary metal-oxide semiconductor (CMOS) process. The pre-process uses 0.35um DPQM (Double Polysilicon Quadric Metal) CMOS process which was obtained from TSMC (Taiwan Semiconductor Manufacturing Company). Two post-processes are used to etch the selected sacrificial layers, thus releasing the suspended rotor. One process uses metal as the sacrificial layer etched by phosphoric acid. The other utilizes silicon oxide as the sacrificial layer etched by Hydrofluoric (HF).
Two methods of driven circuits are proposed. One uses the master-slave register circuit produces a three-phase signal (Q1、Q2、Q3), and utilizes the four-stage heap pump circuit generates voltage of up to about 25V. The other makes j-k flip-flop circuit and the four-stage heap pump circuit to create high voltage.
In our design, there are two rotors which have diameters of 50um and 100um with air gap, as defined by the distance between stator and rotor, 1um and 2um , respectively. We combine CMOS and MEMS (Micro-Electro-Mechanical System) technology to fabricate electrostatic micromotors, and create circuits and mechanisms which are embedded on a chip, thus improving efficiency and while reducing size (1.732mm*1.732mm ).
Subjects
嵌入晶片
CMOS製程
靜電微馬達
embedded chip
micromotor
CMOS process
Type
thesis
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