Research of DLP-Based Micro Three-Dimension Measurement System
Date Issued
2004
Date
2004
Author(s)
Sung, Hsin-Ming
DOI
zh-TW
Abstract
As the minimization of electric components spreads out, optical measurement techniques are developed toward micro-scale profile measurement. This research is proposed to construct a prototype of precision 3D measurement system, Stereo Microscopy, for the purpose of profile and dimension of micro components. It provides the concept and system design of micro 3D reverse engineering.
The main techniques of the system include digital fringe projection technology (DFP) and phase-shifting principle. Due to line scanning is replaced by fringe pattern (Area Structured Lighting), efficiency will be improved. The precision of measurement will be arised by phase-shifting principle. Besides, we can control the period and number of fringes to improve the flexibility of system by integrating digital micro-mirror device (DMD) into the system
In this research, the fringe pattern, which is 5mm×3.75mm in dimension, will be provided to reconstruct the 3D profile and the dimensional measurement of objects. The accuracy and standard deviation σ of the system is 5.4μm and 3.18μm. It can reconstruct the 3D profile of the components which are in the range of mm to μm. It can also easily measure some certain kind of samples that are difficult to be measured by white light interferometry.
Subjects
立體顯微術；數位條紋投影技術；相位移量測原理；數位微鏡晶片
Stereo Microscopy；digital fringe projection techn
Type
thesis
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