A Heuristic Input Control Method for a Single-Product and High-Volume Wafer Fabrication to Minimize the Number of Photomask Changes

Resource

Journal of Manufacturing Systems 23 (1): 30-45

Journal

Journal of Manufacturing Systems

Journal Volume

23

Journal Issue

1

Pages

30-45

Date Issued

2005

Date

2005

Author(s)

Chern, C.C.

Huang, K. L.

URI

http://ntur.lib.ntu.edu.tw//handle/246246/84997

File(s)

Name

2.pdf

Size

5.88 MB

Format

Adobe PDF

Checksum

(MD5):2fddb9e7bb06f3cd77d0b82be8edb54d