Efficient 193 nm-laser assisted cryogenic etching of GaN with Cl2/CH4

Resource

Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on

Journal

Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on

Pages

-

Date Issued

1999-05

Date

1999-05

Author(s)

Chen, B.C.

Chiang, H.C.

Yang, C.C.

Peng, Y.H.

Shih, M.C.

Chuang, T.J.

DOI

DOI

N/A

URI

Type

journal article

File(s)

Name

00834367.pdf

Size

152.06 KB

Format

Adobe PDF

Checksum

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