Design and Development of Array Type Quartz Crystal Microbalance
Date Issued
2007
Date
2007
Author(s)
Shih, Hsuan-Ning
DOI
zh-TW
Abstract
The desirable purpose of the bio-detective researchers is a highly stable, highly sensitive system that is high speed and easy to use. As Quartz crystal microbalance (QCM) satisfies all of the above-mentioned properties, it is now widely applied in many biotech analytic fields.
This thesis sets up a method to pursue optimum design of array type QCM by using numerical packages (ANSYS) so as to provide a low cost and high efficiency design and development.
In addition, two-channel QCM was fabricated by using microfabrication technology in order to circumvent the difficultly in fabricating miniature devices on quartz substrate by using traditional manufacturing methodologies,. After systematic testing, it is verified that the methods developed in this thesis can lead to the successful development of a miniature array type bio-QCM sensor system.
Subjects
石英晶體
有限元素法
陣列式
QCM
ANSYS
array
Type
thesis
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