三維原子探針簡介
Other Title
Three-Dimensional Atom Probe
Journal
科儀新知
Journal Issue
209
Start Page
29
End Page
39
ISSN
1019-5440
Date Issued
2016-12
Author(s)
Abstract
三維原子探針是當代唯一能夠提供三維度影像以及定量化學成分鑑定的原子級材料分析技術。它已經被應用在冶金、電子、半導體、光電、能源、地質、以及生醫研究等諸多科技領域。本文主要提供了原子探針的歷史與原理，期待能供讀者對三維原子探針的基礎認識。
Three-Dimensional Atom Probe (3DAP) is the only materials characterization technology offering capabilities for both three-dimensional image and chemical composition measurement at the atomic scale. It has been applied to many scientific and technological fields, including metallurgy, electronics, semiconductor, optoelectronics, energy, geology, and biomedical researches. The current article provides an introduction to history and principle of atom probe. It is expected to give readers basic understanding in 3D atom probe.
Type
journal article