Publication: Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration
| cris.lastimport.scopus | 2025-05-13T22:01:22Z | |
| cris.virtual.department | Materials Science and Engineering | en_US |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtualsource.department | 7a16da9c-7b97-4621-b189-0e11d96cd673 | |
| cris.virtualsource.orcid | 7a16da9c-7b97-4621-b189-0e11d96cd673 | |
| dc.contributor.author | Shigetou, A. | en_US |
| dc.contributor.author | Yang, T.H. | en_US |
| dc.contributor.author | C. ROBERT KAO | en_US |
| dc.creator | Shigetou, A.;Yang, T.H.;Kao, C.R. | |
| dc.date.accessioned | 2021-02-04T02:27:26Z | |
| dc.date.available | 2021-02-04T02:27:26Z | |
| dc.date.issued | 2019 | |
| dc.identifier.doi | 10.1109/3DIC48104.2019.9058786 | |
| dc.identifier.scopus | 2-s2.0-85084113427 | |
| dc.identifier.uri | https://www.scopus.com/inward/record.url?eid=2-s2.0-85084113427&partnerID=40&md5=7cae8cd28088d0bd10d27f46c4b9841b | |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/546628 | |
| dc.relation.ispartof | IEEE 2019 International 3D Systems Integration Conference, 3DIC 2019 | |
| dc.title | Hydrolysis-Tolerant Hybrid Bonding in Ambient Atmosphere for 3D Integration | en_US |
| dc.type | conference paper | |
| dspace.entity.type | Publication |