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College of Electrical Engineering and Computer Science / 電機資訊學院
Photonics and Optoelectronics / 光電工程學研究所
Fabrication of Sub-Quarter-Micron Grating Patterns by Employing DUV Holographic Lithography
Details
Fabrication of Sub-Quarter-Micron Grating Patterns by Employing DUV Holographic Lithography
Journal
Micro-and-Nano-Engineering
Pages
199-200
Date Issued
1998-01
Author(s)
L. A. Wang
C. H. Lin
H. L. Chen
LON A. WANG
URI
http://scholars.lib.ntu.edu.tw/handle/123456789/342848
Type
conference paper