Precision tracking control of a piezoelectric-actuated system
Journal
Precision Engineering
Journal Volume
32
Journal Issue
2
Pages
71-78
Date Issued
2008
Author(s)
Abstract
In this paper, precision tracking control of piezoelectric-actuated systems is discussed. In order to obtain precision tracking control, a modified Prandtl-Ishlinskii (MPI) model is used to model the hysteresis nonlinearity. Then, the inverse MPI model is used to reduce the hysteresis nonlinearity, and a sliding-mode controller is used to compensate for the remaining nonlinear uncertainty and disturbances. In general, the piezoelectric-actuated system can be modeled as a linear model coupled with a hysteresis. When the linear model is identified, it is used to design the sliding-mode controller. Finally, this design method is applied to the motion control of a nano-stage, and experimental results are presented to verify the usefulness of this method. ? 2007 Elsevier Inc. All rights reserved.
Subjects
Control nonlinearities
Electronic circuit tracking
Engineering
Hysteresis
Mathematical models
Motion control
Sliding mode control
Uncertainty analysis
Modified Prandtl Ishlinskii (MPI) models
Nanopositioning
Tracking control
Piezoelectric actuators
SDGs
Type
journal article