Three-axis accelerometer in CMOS MEMS
Journal
International Microsystems, Packaging, Assembly and Circuits Technology Conference
Date Issued
2009-10
Author(s)
Abstract
A three-axis accelerometer is designed and implemented using TSMC 0.18μm 1P6M CMOS MEMS process. A low-power low-noise chopper-stabilized amplifier is also designed to reduce the flicker noise. ©2009 IEEE.
SDGs
Type
conference paper