Design and Development of a Uniaxial Precision Aerostatic Actuation Platform with Vibration Isolation and Research on Its Performance
Date Issued
2008
Date
2008
Author(s)
Yin-Yu, Lai
Abstract
The thesis presents a design of a novel aerostatic linear actuation platform and precise pressure regulator. The rectangular aerostatic bearing is divided into three parts to accomplish the radial and axial restrictor. The radial compound restrictors in double rows have sufficient stiffness to against the pitching moment. Furthermore, the frictionless aerostatic film can support the actuator to increase the actuation accuracy. Two axial orifice restrictors provide outstanding loading capacity for the actuator and realize reciprocating actuation through regulation of their differential pressure. By using the parallel-field concept, the precise pressure regulator is accomplished through variation of length and shape of the flow channel, and it can further regulate the supply pressure for the actuator. For studying and verifying the performance, the finite element analyses and the experiments are carried out to find out the relationship between the loading capacity and the air gap, and the relationship between the differential pressure and the regulating angle of the precision pressure regulator.
Subjects
rectangular aerostatic bearing
compound restrictors
orifice restrictor
actuator, precision pressure regulator
Type
thesis
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