Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook

Journal

Journal of Scheduling

Journal Volume

18

Journal Issue

2

Pages

195-205

Date Issued

2015

Author(s)

Yugma, C.

Blue, J.

Dauz?re-P?r?s, S.

Obeid, A.

DOI

10.1007/s10951-014-0381-1

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/467308

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84924221289&doi=10.1007%2fs10951-014-0381-1&partnerID=40&md5=f5aee0884d15f4ccb01f990f5c9d7e91

Type

journal article