A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling
Resource
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20(10), 105009
Journal
Journal of Micromechanics and Microengineering
Pages
105009
Date Issued
2010
Date
2010
Author(s)
Liao, Hsin-Hung
Abstract
In this work, we develop a microelectromechanical digital-to-analog converter mirror module (M-DACMM) and demonstrate its application for non-contact optical surface profiling systems. The proposed device generates nano-scale step motions that are proportional to input digital signals. A fabrication process, which is capable of releasing a large-area movable mirror without etching holes, is proposed to realize the M-DACMM monolithically. The transient responses of the mirror module are also measured and discussed. The switching time between two input binary states is less than 80 ms. The measured full-scale displacement is 1050 nm, and the motion step is 72 nm. The M-DACMM is also successfully installed on a surface profiling system as a reference mirror module. The surface-profiling results measured by the system are also presented. © 2010 IOP Publishing Ltd.
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Type
journal article
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