Optical characterization of GaN microcavity fabricated by wet etching
Resource
Physica Status Solidi (C) 3 (6): 2019-2021
Journal
Physica Status Solidi (C) Current Topics in Solid State Physics
Journal Volume
3
Pages
2019-2021
Date Issued
2006
Date
2006
Author(s)
Abstract
We report a novel technique to fabricate gallium nitride (GaN) microcavities by combining the methods of photo-enhanced wet chemical oxidation and crystallographic etching. Such GaN microcavities exhibit mirror-like vertical facets composing of {1100}GaN and various gemoetry of hexagonal, trigonal and cylindrical shapes. The emission spectra of the GaN micro-cavities are found in resonance with the whispering gallery (WG) modes when pumped with a 266 nm Nd:YAG laser. The signatures of GaN microcavities were further characterized by an increase of the WG mode spacing with the reduced device size and suppression of the side mode emission intensity with pump intensity. © 2006 WILEY-VCH Verlag GmbH & Co. KGaA.
Other Subjects
Emission spectra; GaN microcavity; Optical characterization; WG mode spacing; 68.37.Hk; 68.55.Jk; 78.55.Cr; 81.05.Ea; 82.45.Vp; Cavitation; Etching; Neodymium lasers; Optical properties; Oxidation; Resonance; Emission spectroscopy; Microcavities; Wet etching; Whispering gallery modes; Gallium nitride
Type
conference paper
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