Micromechanical RSSI Based on Force Interaction Derived Tapping Bandwidth Variation in VIBRO-IMPACT Resonators
Journal
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Journal Volume
2023-January
ISBN
9781665493086
Date Issued
2023-01-01
Author(s)
Abstract
This work demonstrates a micromechanical received signal strength indicator (RSSI) circuits based on CMOS-MEMS folded-beam comb-drive tapping-mode resonators. In particular, the tapping bandwidth of vibro-impact resonators that exhibits a linear growth as a function of input signal level when the dominant contact force transits from the attractive to repulsive force is used as RSSIs for ultra-low power indoor positioning reader applications. Based on CMOS-MEMS folded-beam comb-drive resonators, two designs are presented specifically for this purpose: (1) applying gap-narrowing technique to improve sensitivity, and (2) double-sided stoppers with different gap spacing to create digitized bandwidth vs. input signal strength for event-oriented positioning. These techniques would help to solve the power consumption and decoding problems of previous indoor localization method.
Subjects
CMOS-MEMS | indoor positioning | received signal strength indicator | vibro-impact resonators
SDGs
Type
conference paper