Localized electrochemical deposition process improvement by using different anodes and deposition directions

Journal

Journal of Micromechanics and Microengineering

Journal Volume

18

Journal Issue

10

Date Issued

2008

Author(s)

Lee, C.-Y.

Lin, C.-S.

Lin, B.-R.

DOI

10.1088/0960-1317/18/10/105008

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491057

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-58149333769&doi=10.1088%2f0960-1317%2f18%2f10%2f105008&partnerID=40&md5=644f0ecdfac9b47dd6be3d89e89ef2ad

Type

journal article