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College of Engineering / 工學院
Engineering Science and Ocean Engineering / 工程科學及海洋工程學系
Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
Details
Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy
Resource
Sensors, 10(4), 2675-2693
Journal
Sensors
Pages
2675-2693
Date Issued
2010
Date
2010
Author(s)
MAO-HSIUNG CHIANG
DOI
10.3390/s100402675
URI
http://ntur.lib.ntu.edu.tw//handle/246246/244460
Type
journal article
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Name
96.pdf
Size
23.38 KB
Format
Adobe PDF
Checksum
(MD5):2b58c64b04b2e572ce49f2d106ff4dca
