Fabrication of diffractive optical lens for beam splitting using LIGA process

Journal

2006 IEEE International Conference on Mechatronics and Automation

Journal Volume

2006

Pages

1242-1247

Date Issued

2006

Author(s)

Yang, J.J.

Liao, Y.S.

Chen, C.F.

YUNN-SHIUAN LIAO

DOI

10.1109/ICMA.2006.257804

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448661

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247198306&doi=10.1109%2fICMA.2006.257804&partnerID=40&md5=ee969deebc908d477b143b40d78061f0

Type

conference paper