Preparation of Low Dielectric Constant Nanoporous Films from Poly(Silsesquioxane) with Amphiphilic Block Copolymers or Organic Non-solvent
Date Issued
2004-10-06
Date
2004-10-06
Author(s)
DOI
922216E002010
Abstract
In this study, nanoporous films were
prepared from poly(methyl silsesquioxane)
(MSSQ) by the templating of amphiphilic
block copolymers,
poly(styrene-b-2-vinylpyridine) (PS-b-P2VP)
and poly(styrene-b-acrylic acid) (PS-b-PAA).
The intermolecular hydrogen bonding
interaction between the MSSQ and PS-b-P2VP
prevented the aggregation of the porogens before curing, which was supported from the
results of FTIR, MDSC and molecular
simulation. The pore size of the nanoporous
MSSQ thin films through the templating of the
PS-b-P2VP was less than 10 nm from the TEM
characterization, which was close to the
porogen size. However, the experimental
results suggested that the both intermolecular
and intramolecular hydrogen bonding existed
in the system of the MSSQ/PS-b-PAA hybrid.
Thus, a macrophase separation was occurred in
the MSSQ/PS-b-PAA hybrid and resulted in
non-uniform nanopores after pyrolysis. The
refractive index and dielectric constant of the
prepared nanoporous films could be tuned in
the range of 1.361 ~ 1.111 and 2.67 ~ 1.30,
respectively, by varying the porogen ratio. The
porous formation mechanism was proposed
through the miscibility between
organic/inorganic moieties.
Subjects
amphiphilic block copolymer
poly(methyl silsesquioxane) film
hydrogen
bonding
bonding
miscibility
pore
Publisher
臺北市：國立臺灣大學化學工程學系暨研究所
Type
report
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