Linearization of a Two-Axis MEMS Scanner Driven by Vertical Comb-Drive Actuators
Date Issued
2007
Date
2007
Author(s)
Lu, Li-Cheng
DOI
zh-TW
Abstract
MEMS (Micro-Electro-Mechanical Systems) scanners have been widely adopted in telecommunications, projection displays, and biomedical images. If we want to linearize the scanning field of a MEMS scanner, which is distorted by
the intrinsic nonlinearity of the electrostatic torques, we must have an effective feedback mechanism to calibrate deviations.Several approaches have been proposed to suppress the scan pattern distortion of parallel-plate structure. Hiroshi et al. demonstrated the linearization of a two-axis parallel-plate MEMS scanner by using a
differential-voltage driving scheme, which was relatively simple and was realized in open-loop operation. It not only reduces the power consumptions, but also suppresses the crosstalk of two orthogonal scan axes.A driving scheme using a pair of differential voltages (Vx, Vy) over a bias
voltage is proposed to linearize the dc characterization (angle vs. voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with leverage mechanism.First of all, We find the optimize DC bias voltage form simulations by mathcad, and try to define the range of linear scanning fields. Second, Observing
the distribution of laser light spots in linear scanning fields of different DC bias voltages. Finally the experimental results indicate that the differential voltage
operation is effective to linearize the scanning field of lever-driven two-axis analog micromirrors.
Subjects
微機電系統
二維微掃描鏡
線性化
梳型驅動致動器
差動
Microelectromechanical systems
two-axis scanner
linearization
comb-drive actuator
differential
Type
thesis
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