Design and development of a miniature self-propelled ultrasonic piezoelectric plate motor
Journal
Active and Passive Smart Structures and Integrated Systems XIX
Part Of
Active and Passive Smart Structures and Integrated Systems XIX
Start Page
55
Date Issued
2025-03-17
Author(s)
Editor(s)
Tol, Serife
Nouh, Mostafa A.
Yang, Jinkyu
Huang, Guoliang
Li, Xiaopeng
Chen, Yangyang
Sugino, Christopher
Abstract
This study developed a miniature self-propelled ultrasonic piezoelectric plate motor designed for precise actuation in a compact structure. This motor was comprised of a 9 mm × 6 mm × 0.3 mm stainless steel plate and a 0.2 mm thick PZT actuator with free edges to avoid complex fixtures. To enable self-propelled motion, the superposition of Φ20 and Φ21 modes was used to generate the traveling waves based on the Two-Integer-Frequency, Two-Mode (TIF-TW) driving method, which drove the motor in the same direction. Since no analytical solution exists for a plate with free boundary conditions, the Rayleigh quotient method was used to approximate mode shapes and resonant frequencies, and finite element analysis (FEA) was performed for validation. A cost function based on the Hilbert Transform was introduced to optimize wave stability and reduce standing wave effects. FEA results confirmed that superimposing Φ20 (26 kHz) and Φ21 (52 kHz) can generate stable traveling waves. With time-dependent simulations, we obtained a consistent wave amplitude range of -3.02 × 10-4 mm to 2.9 × 10-4 mm, ensuring predictable micro-displacements. Our findings demonstrate the feasibility of our proposed ultrasonic piezoelectric plate motor for compact ultrasonic actuation and self-propelled motion.
Event(s)
Active and Passive Smart Structures and Integrated Systems XIX 2025, Vancouver, 17 March 2025 through 21 March 2025. Code 209150
Subjects
Hilbert transform
traveling wave
two-integer-frequency two-mode
ultrasonic piezoelectric motor
Publisher
SPIE
Type
conference paper