A multiple degress of freedom electrothermal actuator for a versatile MEMS gripper
Journal
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
1035-1038
Date Issued
2009
Author(s)
Abstract
In this paper, we present a versatile MEMS gripper capable of two-dimensional manipulation. This is accomplished by a multiple degrees of freedom electrothermal actuator which can achieve independent in-plane and out-of-plane motions. The device is fabricated with the MetalMUMPs process, which offers silicon nitride, polysilicon, and nickel as the major structural materials. The electrothermal actuator achieves large movement. The in-plane and out-of-plane tip displacements are 83.7 μm at 0.6 V and 98 μm at 87.2 V, respectively. ©2009 IEEE.
SDGs
Type
conference paper