A multiple degress of freedom electrothermal actuator for a versatile MEMS gripper

Journal

IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Pages

1035-1038

Date Issued

2009

Author(s)

Chen, D.-S.

Yin, C.-Y.

Lai, R.-J.

Tsai, J.-C.

DOI

10.1109/MEMSYS.2009.4805563

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-65949113842&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/350112

SDGs

[SDGs]SDG16

Type

conference paper