Thermal conductivity of Si/SiGe superlattice films

Journal

Journal of Applied Physics

Journal Volume

104

Journal Issue

11

Date Issued

2008

Author(s)

Liu C.-K.

Yu C.-K.

Chien H.-C.

Kuo S.-L.

Hsu C.-Y.

Dai M.-J.

Luo G.-L.

Huang S.-C.

DOI

10.1063/1.3032602

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-58149259988&doi=10.1063%2f1.3032602&partnerID=40&md5=2fc25f166de8bbd7a6625083d1d69131

https://scholars.lib.ntu.edu.tw/handle/123456789/411158

Type

journal article