A fiber variable optical attenuator made by a large-stroke polymeric deformable mirror
Journal
IEEE Photonics Technology Letters
Journal Volume
21
Journal Issue
19
Pages
1432-1434
Date Issued
2009
Author(s)
Abstract
In this letter, we report a cost-effective variable optical attenuator made by a large-stroke deformable mirror (DM). The DM consists of a 1-mm-circular polymeric membrane, which is actuated by electrostatic force from an electrode underneath it. There are photoresist pillars between the polymeric membrane and the electrode to cause squeeze damping so that the response time is reduced to 1.2 ms. The polymeric deformable is aligned with a dual fiber collimator to perform optical attenuation by 3-D beam spoiling effect. The maximum dynamic range is 30 dB with 0.16-dB/V resolution. The maximum voltage is 188 V and the power consumption is 160 μW. The 0.46-dB insertion loss is achieved at 1550-nm wavelength. The polarization-dependent loss and wavelength-dependent loss are 0.25 dB and 0.5 dB, respectively, over the conduction band. © 2009 IEEE.
SDGs
Type
journal article