The affinity of Si–N and Si–C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

Journal

Diamond and Related Materials

Journal Volume

14

Journal Issue

3-7

Pages

1126-1130

Date Issued

2005

Author(s)

C. W. Chen

C. C. Huang

Y. Y. Lin

K. H. Chen

DOI

https://doi.org/10.1016/j.diamond.2004.10.045

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503971

Publisher

Elsevier B.V.

Type

journal article