Development and characterization of a combinative technique for improving the polishing performance of diamond microarray dresser

Journal

Diamond and Related Materials

Journal Volume

29

Pages

69-78

Date Issued

2012

Author(s)

Shih, C.-J.

Yeh, C.-H.

Lin, C.-S.

Pan, Y.-N.

DOI

10.1016/j.diamond.2012.08.004

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491039

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84865963560&doi=10.1016%2fj.diamond.2012.08.004&partnerID=40&md5=f7611111f8889075c8f91b8f2de7feb8

Type

journal article