Research and development of an intelligent nano-positioning control on ultrasonic motor system
Date Issued
2005
Date
2005
Author(s)
Lai, Zi-Fa
DOI
zh-TW
Abstract
The research proposed a positioning system with nano resolution. Utilize ultrasonic motor as the actuator, and develop orthogonal signal decoding method for LDGI (Laser Diffraction Grating Interferometer) as displacement feedback with high accuracy. Based on FCMAC (Fuzzy Cerebellar Model Articulation Controller) control algorithm for controlling and predicting the variation of ultrasonic motor friction driving, establishing PC-Based positioning integral system in with BCB (Borland C++ Builder) software and National Instrument DAQ (Data Acquisition) Device, to achieve the demand of intelligent nano positioning control.
In recent years, due to the developing of nano technologies, traditionally piezoelectric device is regarded as actuator in precision positional devices, and the stroke is limited. Therefore it’s generally combined with another long-stroke stage to accomplish high-resolution and long-stroke purpose. However, accompanied assembling and volumetric error will be generated, and the controlling system will become much complicated. In this research the selecting actuator is ultrasonic motor, with resonant state to drive in long-stroke and high-speed, and bending mode to provide acting as piezoelectric actuator to achieve high-resolution. Therefore the long-stroke and high-resolution demand of nano positioning system is achievable with ultrasonic motor.
In positioning system developing, introduce the principle of ultrasonic motor and simulating at first. For the several controlling modes to achieving long-stroke and high-resolution positioning, design experiments to observe and realize the phenomenon while driving. For the driving status of friction variation because of friction driving property, design FCMAC controlling algorithm for each modes respectively, to make each friction variation status could get a suitable response, prediction, and control.
For displacement feedback, utilize LDGI and developing method to eliminate error of orthogonal signal, and developed positioning system base on class concepts for extension requirements. Furthermore, DVD pick-up head and triggering device design are utilizing for measurement applications.
Subjects
超音波馬達
模糊小腦控制器
雷射繞射光柵干涉儀
DVD量測探頭
Ultrasonic motor
FCMAC
LDGI
DVD pick-up head
Type
thesis
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