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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Modeling on Dressing Effects in Chemical Mechanical Polishing with Diamond Dressers
Details
Modeling on Dressing Effects in Chemical Mechanical Polishing with Diamond Dressers
Journal
Int. J. of Abrasive Technology
Journal Volume
3
Journal Issue
1
Pages
175-180
Date Issued
2010
Author(s)
Chen, K.R.
Young, H.T.
HONG-TSU YOUNG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587659
Type
journal article
