Formation of silicon surface gratings with high-pulse-energy ultraviolet laser

Journal

Journal of Applied Physics

Journal Volume

88

Journal Issue

11

Pages

6162-6169

Date Issued

2000

Author(s)

Chen, C.-Y.

Ma, K.-J.

Lin, Y.-S.

Liu, C.-W.

Hsu, C.-W.

Chao, C.-Y.

Gurtler, S.

CHIH-CHUNG YANG

DOI

10.1063/1.1309038

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/506103

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0012798403&doi=10.1063%2f1.1309038&partnerID=40&md5=33b75017f4e12354dc93da82f88b1ab6

Type

journal article

File(s)

Name

09.pdf

Size

424.14 KB

Format

Adobe PDF

Checksum

(MD5):0bae1c79dd83b043bbcdb41da127be83