Research on Nano Probe Encoding
Date Issued
2004
Date
2004
Author(s)
Lin, Yen-Chun
DOI
zh-TW
Abstract
With the development of nanotechnology, many kinds of theories and applications in the nano-scale world have been continuously proposed, especially the first demonstration of the scanning probe microscope (SPM) which is capable of imaging surface topography with atomic scale resolution. Multidisciplinary research based on the combination of the SPM and structures fabricated by Micro-Electrical-Mechanical System (MEMS) process is getting more and more popular. Therefore, it will definitely be a milestone on the roadmap of nanotechnology if proposed technologies are creatively organized to open a floor for potential novelty.
In this paper, a novel probe encoding technology is proposed, including the systematic design and the demonstration of its encoding performance. The concept has been successfully realized with an atomic force microscope (AFM) system probing the topography of a grating. For the purpose of encoding, a grating moves under the probe oscillating at a relatively high frequency. When the probe tip contacts with a scale on the grating, the topography signal of the periodic surface is divided into many pulse segments whose pulse widths are much thinner than the original periodicity. This phenomenon, due to the relative motion of the probe and the grating, is the same as the pulse width modulation (PWM) widely used in the class-D power amplifier. With the signal subdivision, the resolution of the grating is greatly improved, from tens of a micrometer to tens of a nanometer. Optimal parameters are obtained by mathematical descriptions and computer-aided dynamic simulations for the following experiments. By the experiments, the performance of the probe encoding technology is analyzed and its availability as a high-resolution displacement encoder is well-proved.
Subjects
訊號細分割
原子力顯微鏡
位移編碼器
週期性結構
探針編碼技術
probe encoding technology
displacement encoder
signal subdivision
periodic grating
AFM
Type
thesis
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