Load-Carrying and Stability Improvement of a Miniature Ultrasonic Piezoelectric Plate Motor
Part Of
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
13949
Start Page
1394914
ISSN
0277786X
ISBN (of the container)
9781510698390
ISBN
9781510698390
Date Issued
2026-04-15
Author(s)
Abstract
This paper reports on a miniature plate-type ultrasonic piezoelectric motor with integrated closed-loop control for stabilized motorization. The actuator, with dimensions of 9mm × 6mm × 0.5mm, employed a multi-integer-frequency two-mode driving method to generate stable traveling waves on a free-boundary plate, with driving parameters optimized using Hilbert transform-based cost functions. The motor achieved multi-degree-of-freedom locomotion and maintained stable operation under varying loads, surface friction, and inclination angles. To address trajectory deviation and instability inherent to miniature ultrasonic motors, a vision-based closed-loop control framework was established, including a system identification with fitted accuracies of 94.26% and 96.82% and with PID control implementation. Experimental results showed that the closed-loop control reduced the average orientation deviation from 10.2 degrees to 2.63 degrees, suppressed straight-line walking error by 81.6%, and increased maximum translational speed from 67.7 mm/s to 122.4 mm/s. The motor further sustained a reliable motion while carrying a 1.152 g payload, equivalent to 4.92 times its own weight. These results demonstrated that by combining harmonically synchronized multi-mode excitation with feedback control, it is possible to achieve stable, efficient, and controllable locomotion.
Event(s)
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2026, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2026, Vancouver
Subjects
load-carrying
PID control
stability enhancement
traveling wave
ultrasonic piezoelectric motor
Publisher
SPIE
Type
conference paper