MOS Structure Solar Cells on Recycle Silicon Wafer
Date Issued
2007
Date
2007
Author(s)
GUO, JIA-WUN
DOI
en-US
Abstract
Due to the conscious consumption of petroleum, the energy question becomes the main subject in which the humanity concerned much. The solar cell is one of the possible solutions to the about problem. It is of importance to enhance the efficiency and reduce the cost for the solar cell. In this paper, we will investigate the metal-oxide-semiconductor (MOS) structure solar cells by the different methods of oxide preparation in the recycle wafers. We find that the oxides in H2SiF6 solution are useful for MOS solar cells’ application. After the inter-cathode semi-transparent thin Al films deposition, the solar cells’ performance can be improved.
In chapter 2, growth models for rapid thermal processing (RTP) of silicon are introduced. This method can provide good uniformity, but the thickness control is citical. We also discuss the MOS structure solar cells on new and recycle silicon wafer. We can find that the oxides’ surface roughness on new wafer is inferior to that on recycle wafer. However, both of the efficiencies for new and recycle wafer will be greatly reduced when the oxide thickness is greater than 2nm.
In chapter 3, growth models for DC anodization of silicon are introduced. The ultra-thin gate oxides were prepared by anodization in H2O followed by low temperature annealing on new and recycle wafers. In addition, the ultra-thin gate oxides were also prepared by anodization in dilute H2SiF6 solution followed by low temperature annealing. Although, the oxides prepared in pure water reveal electrical better quality in comparison with those prepared in dilute H2SiF6 solution, the performances of the MOS solar cells are on the contrary. In addition, for the oxides prepared the H2SiF6 solution, it was found that almost the efficiencies of recycle and new silicon wafers are the same. Therefore, the recycle wafers for MOS solar cells are of interest since they are cost-effective.
In chapter 4, the conclusion is finally given.
Subjects
太陽電池
Solar Cells
Type
thesis
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